ABSTRACT
Interferometry provides the highest quantitative vertical resolution and repeatability of any surface measurement technique. As such, it has found application in a variety of research groups as well as industry for quantification of feature heights, surface texture, relative angles, radii of curvature, and other metrics which require precision distance or surface measurements. Interferometric methods are also typically quite rapid, with distance-measuring interferometers sensing thousands of times per second, phase-shifting measurements capturing entire fields of view in a fraction of a second, and coherence-sensing techniques (such as white-light interferometry) typically taking
CONTENTS
9.1 Introduction ........................................................................................................................ 369 9.2 Automation within a Measurement ................................................................................ 370
9.2.1 Focus Automation .................................................................................................. 370 9.2.2 Intensity Automation ............................................................................................ 371 9.2.3 Scan Length Automation ...................................................................................... 372 9.2.4 Measurement Averaging ...................................................................................... 373 9.2.5 Tilt Automation ...................................................................................................... 373 9.2.6 Summary of Automation within a Measurement ............................................. 375
9.2.6.1 Repeated Measurements ........................................................................ 375 9.2.7 Automating Multiple Measurements .................................................................. 376
9.3 Part Fixturing ..................................................................................................................... 377 9.3.1 Sample Holding General Requirements ............................................................. 378 9.3.2 Nonadjustable Fixtures ......................................................................................... 379 9.3.3 Adjustable Fixtures ................................................................................................ 379 9.3.4 Special Considerations ..........................................................................................384 9.3.5 Automated Positioning Stages .............................................................................384
