ABSTRACT
Microsystems are small-dimensional intelligent objects, with sizes ranging from centimeters to micrometers, which present a well-identified function, and are elaborated by different technologies of manufacturing in parallel already well mastered in microelectronics. During the 1980s, several laboratories proposed integration of a local chemical etching of thin layers of soft silica to release the mechanical mobile parts of (MEMS) microelectromechanical systems. Nanotechnologies lead to creating infinitely local functions using either sculpture by manipulating atoms, molecules, or molecular assembly. A significant example is the concept of MEMS memory Millipede by IBM, which corresponds to a microadvanced matrix for thermoelectric reading/writing with a high density. Microelectronics evolved toward ultra-miniaturization known as nanoelectronics. To elaborate micro-mechanisms with parts in movement, the manufacturing process needs to combine surface and volume machining. The distributed microsystems in matrix were generalized for the DNA chips, with massively parallel elements of bio-detection, first developed by the Affymetrix Company.
