ABSTRACT
This chapter describes an electromagnetically actuated lamellar grating Fourier transform infrared spectrometer operating in an out-of-plane mode, including its design, fabrication, and experimental results. The same electromagnetically driven lamellar grating device is used for proof-of-principle demonstration. Types of microelectromechanical system (MEMS) lamellar grating microspectrometers have been reported. Some groups have adopted an in-plane Michelson interferometer configuration, in which all the components such as micromirrors, beam splitters, and MEMS actuators can be simultaneously fabricated. During the device design stage, the actuation method should be first decided upon. There are many actuation methods available for MEMS devices, such as electromagnetic, electrostatic, electrothermal, and piezoelectric. Device driving and Diode-pumped solid-state interference signals are modulated and conditioned into digital signals such that they can be used to trigger the Infrared data acquisition devices and computer algorithms in the system. The chapter presents a detailed description of the electronic data acquisition system.
