ABSTRACT
This chapter focuses on systems and complementary metal oxide semiconductor circuits that interface with the micromachined gyroscopes. Micromachined gyroscopes are based on the Coriolis Effect, where rotation about an axis causes a transfer of energy between two vibratory modes that are orthogonal to the axis of rotation and also to each other. The gyroscope is a sensor used to measure angle or velocity of rotation. It uses vibrating elements to sense rotation and is devoid of any rotating parts or bearings. The Performance improvement is but one aspect of microgyroscope development. Packaging and reliability are the two most important factors that must be considered before micromachined gyroscopes can be viably commercialized. To facilitate low-cost production of microgyroscopes, there is an increased emphasis on the design-for-manufacture and design-for-test. The silicon vibratory gyroscopes attain navigation-grade performance, the interface electronics that actuate, sense, and control the micromechanical structures become key elements in determining the overall performance of the microgyro system.
