ABSTRACT
Sensors fabricated based on MEMS technology are described.
Capacitive pressure sensors were fabricated by wafer-level pack-
aging. Electrostatically levitated rotational gyroscopes have been
developed for high-precision inertia measurement systems. Tactile
sensor networks driven by event are under development for
safe nursing robots. Acoustic sensors for wireless sensing, optical
scanners for 3D imaging, sensors at the end of a catheter in a
blood vessel and microprobes with high spatial resolution and high
sensitivity have been developed as well.
