ABSTRACT
Vacuum ovenware furnace equipment is new vacuum equipment in LED manufacturing industry which is supporting MOCCD equipment. Furnace is pumped to vacuum, processed work pieces are placed in the furnace, take dry cleaning by heating the cleaning gas (cleaning gas: N2, H2), which mainly used to clean the ammoniation gallium and nitrogen aluminum etc. on the MOCVD susceptor (sic coating Graphite disc or quartz disc) effectively, so we can achieve effective cleaning and improve the quality. We need equip one vacuum ovenware furnace for two or three MOCVD equipments. Our country has begun to independent research and development MOCVD equipment, and then developed ovenware furnace. Each year the demanded quantity is about 500 sets which mainly rely on the import of Taiwan (Han T. & Ge Y. 2012). Based on this situation, we design and implement a control system to ovenware furnace based on one kind of MOCVD equipment.
