ABSTRACT
Control and design of Micro-electro-mechanical systems (MEMS) is, nowadays, a fundamental step in widely different engineering fields. The mechanical modeling of an electrically-actuated microbeams, is, often, based on the classical mechanics but recently, the modeling is moving towards the non-classical continuum theories. The deformation has been shown to be size dependent, i.e. high-order elastic theories can catch this phenomena. This work wants to apply the modified strain-gradient elasticity proposed by (Lam, Yang, Chong, Wang, & Tong 2003) at an electrically-actuated clamped-clamped microbeam. We also derive an alternative method to approximate the electric actuation using the Chebyshev method, limiting the error into a specified constrains. The purpose is, thus, to formulate an expression that can be successfully applied in all prescribed domains with a limited and reduced approximation error. The method of differential quadrature is here used to analyse the static behaviour of the electromechanical model. We also investigate the dynamic problem with a Galerkin procedure, evaluating the single-degree-of-freedom response as function of different parameters.
