ABSTRACT
For nanoindentation loads (P) of 50, 70, and 100 μN, the maximum depths of penetration were about 90, 100, and 140 nm. Thus, hmax values were well below 10% of film thickness (1.5 μm), as seen in Figure 38.1a. The average elastic recovery was as high as ≈70% (Figure 38.1a). The nanohardness of the Mg(OH)2 thin films was measured as 0.26-0.24 GPa (Figure 38.1b) when measured at loads of 50, 70, and 100 μN. Similarly, the Young’s modulus data were 2.83-2.70 GPa (Figure 38.1c) when measured at loads of 50, 70, and 100 μN. The best-fit equations, given as insets of Figures 38.1b and 38.1c, predicted nanohardness of 0.31 GPa and Young’s modulus of 2.97 GPa for chemically deposited Mg(OH)2 thin films on the SLS glass substrates. To the best of our knowledge, this is the first such experimental data on chemically deposited Mg(OH)2 thin films on SLS glass substrates.
