ABSTRACT
Nanocrystalline gold incorporated DLC (AuDLC) composite films of 70-120 nm were deposited by a capacitatively coupled rf (13.56 MHz) plasma CVD technique. AuDLC composite films as well as pure DLC thin films were developed on quartz glass. The films had thickness of about 70-120 nm. The AuDLC nanocomposite films were deposited with 50%, 60%, 70%, and 80% of argon in the argon-methane mixture. The corresponding thin films shall
be denoted here as AuDLC50, AuDLC60, AuDLC70, and AuDLC80. The DLC thin films were also similarly deposited with 50%, 60%, 70%, and 80% of argon in the argon-methane mixture. The corresponding thin films shall be denoted here as DLC50, DLC60, DLC70, and DLC80.
