ABSTRACT

Nanocrystalline gold incorporated DLC (AuDLC) composite films as well as pure DLC (diamond-like carbon) thin films were developed on quartz glass. The details of processing are described in Chapters 9 and 41. The films had thickness of about 70-120 nm. The AuDLC nanocomposite films were deposited with 50%, 60%, 70%, and 80% of argon in the argon-methane mixture. The corresponding thin films shall be denoted here as AuDLC50, AuDLC60, AuDLC70, and AuDLC80. The DLC thin films were also similarly deposited with 50%, 60%, 70%, and 80% of argon in the argon-methane mixture. The corresponding thin films shall be denoted here as DLC50, DLC60, DLC70, and DLC80. In the present investigation, partial unloading mode was applied at a peak load of 1000 μN by using a Berkovich indenter.