ABSTRACT
From the special properties of the irradiation, two demands result for the optics, which place the highest requirements on the coating process. On the one hand, the optics have to
15.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 411
15.2 Dynamics of Damage Processes in Dielectric Layers . . . . . . . . . . . . . . . . . . .412
