ABSTRACT
Position sensitive sensor PSD (Position Sensitive Detector) leap in the development in recent years as the representative of the position sensitive device (K 2000 a). PSD itself has time to respond to fast and high position resolution, PSD quickly get a wide range of applications (Q & W 2011b), but due to the non-linear effects of PSD, causing the entire position sensitive sensor measurement data confidence (WJ, Mcgraw-Hill 1988 c). Although the structure and use of the material of the PSD to be improved in a way to improve the linearity of the PSD (M & J & T 2012 d), it is still difficult to overcome the non-linearity of the PSD. PSD having a good linearity in the A region (central region), but the nonlinearity of the PSD of its linearity of the B area (edge area) have a substantial impact and constraints (K & S 2011 e), thus limiting the PSD measurement range and accuracy. The papers from the research impact of the non-linear factors of the two-dimensional PSD, followed by a two-dimensional PSD nonlinear error correction algorithm, derived on the basis of the two-dimensional PSD nonlinear error correction algorithm deficiencies and shortcomings of the PSD, and proposed a new algorithm-LM algorithm PSD nonlinear error correction.
