ABSTRACT
It was a brand new idea that the TPF could be applied for sensors development, such as ISFET pH separate sensor in this study. The developed TPF was qualified according to designed quality items which were reference industrial specification. After annealing (150°C for 90 min), the TPF was measured the average sheet resistance was R1 = 110Ω/ and the transmittance 86% (JIS K7361). The sheet resistance decreased after annealing could be explained as the result of interaction between crack growth and the healing of layer defects (Boehme and Charton, 2005), and the grain size increased and the grain boundary decreased would lead to a lower resistivity.
