ABSTRACT
Microfabrication and field-effect transistors are two key enabling
technologies for today’s information society. It is hard to imagine su-
perfast and omnipresent electronic devices, information technology,
the Internet, and mobile communication technologies without the
access to continuously cheaper and miniaturized microprocessors.
The giant leap in performance of microprocessors from the first
personal computing machines to today’s mobile devices is to a large
extent realized via development of new materials and fabrication
methods leading to miniaturization of the active components.
