ABSTRACT
Model ZDB-1320 cryopump essentially consists of the cryopanel, cooled thermal radiation shield and the baffle, one two-stage cold head and the pump housing with flanges. The schematic drawing is shown in Figure 1. In the crypump, the flange of the second stage of the cold head is contacted to the cryopanels, and the flange of the first stage is empty and has no loads. The operating temperature of the baffle is sensed by a Pt 100 sensor. A silicon diode
is installed at the cryopanel. The baffle and the thermal radiation shield are cooled by liquid nitrogen. The cryopanels are cooled by the second stage of the cold head to below 15 K, so that gases and vapors can be condensed and adsorbed on the very cold surface. The thermal radiation shield and the baffle can reflect the radiated heat from the outside and prevent the heat radiations onto the cryopanels. The cryopumps are designed to remove the gases in the environmental simulation facilities.
