ABSTRACT
This chapter introduces some of the advanced material characterization techniques such as scanning electron microscopy (SEM), energy dispersive X-ray spectroscopy (EDX), and X-ray diffraction (XRD). SEM employs an extremely finely focused electron beam in order to yield high-resolution imaging of samples and their surfaces. EDX appears as a complementary elemental analysis or chemical characterization technique in modern electron microscopes that are equipped with an X-ray spectrometer. EDX analysis assists in the rapid identification of material surfaces, phases, and their distribution across the substrate. EDX instruments have an X-ray spectrometer for the ultra-detection of emitted characteristic X-rays. Depending on the desired structural information, different X-ray scattering methods- wide angle X-ray diffraction (WAXD) or small-angle X-ray scattering (SAXS)- can be used. There are various X-ray detecting technologies, such as gas scintillator detectors and solid state detectors.
