ABSTRACT
Various high-κ gate dielectrics have been proposed in recent years, and the range of the dielectric constant (κ) is fairly scattered from 7.5 of Si3 N 4 to > 100 of ferroelectrics. At this moment, we will categorize the dielectrics into three groups—ultra-high-κ (κ > 100), moderate high-κ (4 < κ < 10), and mid-range high-κ (10 < κ 100)—and evaluate typical materials for each category.
