ABSTRACT
Silicon LSIs (large-scale integrated circuits) have progressed remarkably in the past 25 years. In particular, complementary metal-oxide-semiconductor (CMOS) technology has played a great role in the progress of LSIs. By downsizing2 MOS field-effect-transistors (FETs), the number of transistors in a chip increases, and the functionality of LSIs is improved. At the same time, the switching speed of MOSFETs and circuits increases and operation speed of LSIs is improved.
