ABSTRACT

This chapter considers some basic physical processes from the field of materials science that are of importance in plasma-processing applications. The ability of plasma-based manufacturing methods to improve upon conventional approaches is illustrated by a well-documented example published by Rakowski who did a paired comparison of conventional and plasma surface treatment of wool. Plasma-processing effects are due to the action of active species generated by the interaction of the working gas(es) with the plasma. These active species are rarely available in purely chemical reactors in the concentrations and active states of excitation found in plasma reactors. Two inputs reach the surface of solids exposed to a Lorentzian plasma: the working gas, or feed gas which might be reflected from, adsorb, absorb, or react chemically with the surface; and the active species, which originate directly or indirectly from electron-neutral collisions and subsequent chemical reactions in the plasma.