ABSTRACT
This chapter emphasizes these 'standard' plasma sources, used in large numbers, as well as selected additional sources that show promise for future development. The plasma sources used in industry are described by their manufacturers and users in terms of a small set of characteristics that define their regime of operation. These source characteristics include the plasma type, the nature of its power supply, the operating pressure, and the mode of interaction of the source with a workpiece. The operating pressure of the working gas is a significant factor in choosing a plasma source because it restricts the choice of reactor technology and the type of source used for plasma-processing applications. The most critical choice with respect to pressure is whether the process is to be operated at 1 atm or under vacuum. Plasma sources energized by DC power supplies have the advantage that DC power is relatively inexpensive, ranging from $0.10 to $0.50 per watt.
