ABSTRACT
This chapter presents a detailed account of the entire process of the design and verification of an objective metric of misregistration. The intent of this chapter is to provide a concrete example of the application of various methods and approaches that were described in Chs. 10, 12, and 13. Although a number of other objective metrics will be considered later in Part II, this is the only metric for which all pertinent details are provided. In subsequent discussions, the emphasis will be on selected aspects of objective metric design, or particular challenges faced in experimentation or data analysis.
