Introduction

This introduction presents an overview of the key concepts discussed in the subsequent chapters of this book. The book provides a brief overview of some basic theoretical concepts necessary to understand three-dimensional (3D) sensors. These concepts include interaction of radiation with silicon, the operation principle of silicon sensors, main sensor types, and signal formation and processing. The book reviews the effects of radiation damage on silicon, their macroscopic consequences for sensors performance, and some measures to counteract the effects in practice. It also provides a comprehensive description of 3D silicon sensors, from the operation principle to simulations and experimental results relevant to both the original Stanford device and all the alternative design variants reported thus far. The book describes the key fabrication technology steps used in 3D silicon sensors, ranging from general aspects of the processing to detailed descriptions of the different flavors made at facilities, which developed alternative 3D designs.