ABSTRACT

This chapter reviews the advances in materials, designing concepts, and applications of piezoelectric actuators/transducers, as the reader's review purpose, and describes the future perspectives. Dielectric elastomer actuators are based on the deformation of a soft polymer that acts as a dielectric between highly compliant electrodes. Conventional bimorph bending actuators are composed of two piezoelectric plates or two piezoelectrics and an elastic shim bonded together. Reduction of toxic materials such as lead, heavy metals, and dioxin, and of the use of resources and energy consumption is also key, and society's continuation, that is, status quo or sustainable society, is important to promote. Industrial ultrasonic cleaners are widely utilized in the manufacturing lines of silicon wafers and liquid crystal glass substrates. A photostrictive actuator is a fine example of an intelligent material, incorporating “illumination sensing” and self production of “drive/control voltage” together with final “actuation.”