ABSTRACT
Ultrahigh vacuum (UHV) corresponds to the pressure range between 10–10 Pa and 10−7 Pa and extreme high vacuum (XHV) corresponds to the pressure range below 10−10 Pa.
Ultrahigh vacuum (UHV) corresponds to the pressure range between 10–10 Pa and 10−7 Pa and extreme high vacuum (XHV) corresponds to the pressure range below 10−10 Pa.