ABSTRACT
This chapter reviews a few most widely utilized thin film deposition techniques for the detection of chemical and biochemical sensing. The nanomaterial size materials show dissimilar properties compared to bulk, and therefore, their study is needed for various applications. The sputtering technique is divided into two types namely RF sputtering and DC sputtering. The chemical vapor deposition, chemical bath deposition, sol-gel method, electro-spraying technique, atomic layer deposition, and laser pyrolysis are the most utilized techniques for thin-film fabrication. Typical sol-gel method consists of a metal alkoxides, water acting as hydrolysis agent, alcohol acting as solvent, and add or base acting as a catalyst. Among the two main categories, physical deposition is mainly divided into evaporation and sputtering techniques and another side the chemical deposition is categorized into different methods like sol-gel, chemical bath deposition, spray pyrolysis, and chemical vapor deposition.
