ABSTRACT
Vertical mirrors in the optical waveguide film enable optical Z-connections in the 3D optoelectronic platforms consisting of stacked waveguide films. The authors developed a process called the built-in mask method, which enables duplication of optical waveguide films with vertical mirrors with simplified procedures. In this chapter, the built-in mask method is explained, and then, fabrication and characterization of optical waveguide films with vertical mirrors duplicated by the built-in mask method are reviewed. Two optical waveguide films, Film A and Film B, are stacked by contacting their undercladding layers. By connecting two optical waveguide films with optical vias of the self-organized lightwave network vertical waveguides, light beams can be guided from one vertical mirror to the other with strong confinement, reducing the leakage of the light beams at Optical Z-Connection even if there are misalignments between the vertical mirrors.
