ABSTRACT
In this chapter, multifractal descriptions of sputtered thin films are presented. The chapter uses original data on sputtered aluminium thin films as a case study. Additionally, published literature by the authors of this book and other authors are included. The main multifractal properties of thin films and the general trends in relation to the deposition parameters and surface evolution are also discussed. The chapter emphasizes on the procedure of generating the multifractal data and interpretations of such data to the surface and microstructural evolution of the thin films.
