ABSTRACT

The mechanical properties of solids, as with other physical properties, will be significantly modified by the size reduction of an object. To be able to exploit such properties, it is important to be able to classify them, as well as to be able to measure them and of course, understand. Nanoscale devices, integrated with nanoelectronics will further the development of new devices and is the subject of vast areas of research in science and engineering, with a huge array of applications, ranging from electronics to health care and life sciences. In the case of nanostructures and microstructures, the cantilever has found an enormous interest linked to its use in the construction of the tips used for the various types of scanning probe microscopy. While the first methods used were micromachines of silicon, this material is the most suitable for microfluidic applications, since it is opaque, costly and poses difficulties in component integration.