ABSTRACT

Secondary electron (SE) emission refers to the phenomenon that electron emission from the surface of a solid material (metal, semiconductor and insulator) when incident electrons (primary electron) or other particles with a certain energy impact on the surface of these objects. This chapter mainly describes the basic theory, numerical simulation methods, measuring techniques and some experimental results of secondary electron emission (SEE). The SEE is expounded from the whole physical processes including collision, excitation, movement and emission of electrons in the material. For the numerical simulation of the SEE process, two methods are introduced: Monte Carlo-based particle simulation method and empirical theory model (including Furman model, Everhart model and semi-physics model). Through the typical SEE test equipment, this chapter introduces two most commonly used methods to measure the secondary electron yield (SEY), the collector method and the bias direct current (DC) method, as well as the methods to improve the surface electrification of the medium, analyses the factors affecting the SEY of the material and summarizes the SEY and the secondary electron spectrum data of some common metal materials.