ABSTRACT
A cleanroom is a specially constructed, enclosed area. It is environmentally controlled with respect to airflow patterns, air motion, airborne particles, temperature, and humidity. The quantity of air for all related air systems moving air into or out of the cleanroom are measured before testing and balancing the cleanroom’s airflow patterns, volumes and velocities. Contamination control equipment is influenced by size, type, and quantity of airborne particles which determines if airstreams will be recirculated and how the supply and return or exhaust air will be treated or conditioned. Cleanrooms are contaminated by both external and internal sources. These sources of contamination must be detected and then eliminated or reduced to an acceptable level. The major source for external contamination is through the heating, ventilating and air conditioning system which supplies the cleanroom with outside air for ventilation. External contamination is controlled by filtration and space pressurization.
