ABSTRACT
Different technological aspects of microelectrochemical sensors are discussed in the chapter. Integration of the sensor on the interface circuit chip is the ultimate goal of planar smart sensors. A bipolar or a CMOS (complementary metal oxide semiconductor) process is the ideal technological basis for microelectrochemical sensors. Therefore, a complete range of microelectrochemical sensors can be made with these two sensor technologies. The specific advantages of bicmos for analogue as well as digital circuits however, allow the reader to presume that interesting combinations can be found for microelectrochemical sensors. Since microelectrochemical sensors are exposed to aggressive and hostile environments, an excellent passivation of the electronic circuits and the interconnections is essential for the long-term activity of the sensor. Lift-off is an alternative to conventional etching techniques for the patterning of metal layers.
