ABSTRACT

In this chapter, practical realizations of sensors developed by the authors, as well as by other research groups, are discussed. Several of these techniques have been developed for glucose and oxygen sensors and are detailed in the following sections. The ultimate goal of microelectrochemical sensor research is the realization of a smart sensor, hence microelectronic circuits have to be integrated with the sensor. In this chapter, smart planar ion-selective electrodes, planar voltamrnetric glucose and oxygen sensors, a smart voltammetric and a planar conductometric urea sensor are detailed. Although membranes have been applied with dip-coating techniques on mounted and packaged sensors, in this section only on-wafer techniques are discussed. All steps necessary to prepare a planar sensor have already been discussed separately in this book, so the following procedure for the preparation of a planar glucose sensor is proposed. Microelectrochemical sensors fabricated with integrated-circuit production techniques have already been reported in the literature in 1974 by Butler and Cobbold.