ABSTRACT
In this chapter, a rather more brief description is offered, giving only that theory which is required to make the following chapters comprehensible. In addition, an account is given of some of the more important experimental techniques, together with methods of analysis of results. Diffusion occurs in the presence of a concentration gradient of mobile atoms. In general, the atoms will move in such a way as to remove the gradient. The mathematical solutions to Fick’s second law depend on the boundary conditions, which are determined by the physical conditions of the experiment in question. It is a common experimental technique to use as diffusion source a very thin layer of diffusant deposited on the face of the semiconductor slice. It is usually fairly easy to express a given diffusion problem in terms of Fick’s second law and the associated boundary conditions.
