ABSTRACT
This chapter mainly focuses on the desorption kinetics of GeO from GeO2/Ge. After a brief introduction to the historical desorption study in the Ge:O2/Ge system, the mechanism of GeO desorption from GeO2/Ge is systematically revealed by using Ge and O isotope tracing experiments, together with thermal desorption spectroscopy study. Moreover, desorption of GeO in the nonuniform region is investigated from the viewpoint of morphology study. A kinetic model in the uniform desorption region is proposed in this chapter. In addition, the relationship between GeO desorption and electrical degradation in GeO2/Ge is investigated.
