ABSTRACT
J. K. Weiss,a Jai Ganesh Kameswaran,b A m ith D arbal,a Jiong Zhang,b D i X u ,b and Edgar F. Rauchc aAppFive, LLC, 1095 W. Rio Salado Dr., Suite 110, Tempe, AZ 85281, USA bIntel Corporation, 2501 NW229th, Hillsboro, OR 97124, USA cScience et Ingenierie des Materiaux et Procedes, 1130, rue de la Piscine, 38402 Saint-Martin d'Heres, France jk@appfive.com
The m icrostru ctu re o f polycrystalline m aterials strongly influences the prop erties o f th o se m aterials. In sem icondu ctor devices, the m icrostru ctu re o f in tercon n ects is the m ain lim it on th e device reliability. Due to the ever-d ecreasing scale o f devices, and the correspond ing d ecrease in grain size tow ard the nanom eter regim e, th is stru ctu re is m ore accu rately called nanostructure.
