ABSTRACT
While many engineers and scientists in the electronics industry are familiar with the use of resistance measurements, this chapter will primarily focus on in situ resistance measurements. In situ resistance measurements are performed on site as compared with ex situ measurements, which are typically performed on a tabletop that is external to the processing chamber. The in situ mode of measurement magnifies the understanding of materials and particularly the processes in nanoelectronics. This is a powerful tool because of its ability to perform real-time measurements at the actual site simultaneously while the process is proceeding. Recent technology development has prompted an expansion of many characterization tools to be adapted to in situ mode of operation.
