ABSTRACT
Machine costs for production of integrated circuits (ICs) have expanded exponentially with decreasing pattern size. In order to avoid this cost expansion, nanoimprint processes have been developed. In nanoimprints, molds of micropatterns are produced by the printing process. High-cost machines, steppers, are not necessary. Therefore, micropatterning by nanoimprint is quite effective for decreasing cost fabrication. Three types of nanoimprint processes are thermal, UV, and soft nanoimprint. Details of those processes are given in the following sections.
