ABSTRACT

Table 116.3 and Figure 116.1 show the total scattering cross sections for C3F8 recommended by Christophorou and

116.1 Selected References for Data ....................................................................................................................................... 609 116.2Total Scattering Cross Section.................................................................................................................................... 609 116.3 Elastic Scattering and Momentum Transfer Cross Sections........................................................................................611 116.4Ramsauer-Townsend Minimum..................................................................................................................................611 116.5 Vibrational Excitation Cross Sections..........................................................................................................................611 116.6 Positive Ion Appearance Potentials ..............................................................................................................................612 116.7Ionization Cross Sections.............................................................................................................................................612 116.8Attachment Processes..................................................................................................................................................612 116.9Attachment Rates.........................................................................................................................................................613 116.10Attachment Cross Sections..........................................................................................................................................613 116.11 Drift Velocity of Electrons ...........................................................................................................................................614 116.12Diffusion Coefficients..................................................................................................................................................614 116.13 Ionization and Attachment Coefficients.......................................................................................................................615 References..................................................................................................................................................................................615