ABSTRACT
Oxygen (O2) molecule is an electron-attaching molecule with 16 electrons, electronic polarizability of 1759 × 10−40 F m2, and ionization potential of 1207 eV
See Table 261
261 Selected References for Data 169 262 Total Scattering Cross Section170 263 Elastic Scattering Cross Section170 264 Momentum Transfer Cross Section170 265 Ro-Vibrational Excitation Cross Section170 266 Electronic Excitation Cross Section 172 267 Ionization Cross Section 172 268 Drift Velocity 172 269 Diffusion Coefficient 172 2610 Ionization Coefficient174 2611 Attachment Cross Section 174 2612 Attachment Coefficient175 2613 Gas Constants175 References176
TABLE 26.1 Selected References for Data
Quantity Range: eV, (Td) Reference
Drift velocity (200-4800) Lisovskiy et al. (2006) Transport coefficients (17-350) Jeon and Nakamura
(1998) Ionization cross section 13-1000 Hwang et al (1996)
Ionization cross section 13-998 Straub et al. (1996) Total scattering cross section
04-250 Szmytkowski et al. (1996)
Elastic scattering cross section
1-30 Sullivan et al. (1995)
Total scattering cross section
0001-0175 Randell et al. (1994)
Total scattering cross section
1-1000 Kanik et al (1993)
Ionization cross section 50-400 Evans et al. (1982)
TABLE 26.1 (continued) Selected References for Data
Quantity Range: eV, (Td) Reference
Total scattering cross section
5-300 Kanik et al. (1992)
Ionization cross section 13-1000 Krishnakumar et al. (1992)
Swarm parameters (30-5000) Liu and Raju (1992)
Total scattering cross section
015-914 Subramanian and Kumar (1990)
Elastic scattering cross section
05-1000 Itikawa et al (1989)
Total scattering cross section
5-500 Dabbneh et al. (1988)
Elastic scattering cross section
300-1000 Iga et al. (1987)
Attachment coefficients (05-50) Hunter et al. (1986) Total scattering cross
section 02-100 Zecca et al. (1986)
Transport coefficients (25-850) Al-Amin et al. (1985) Elastic scattering cross section
2-200 Shyn and Sharp (1982)
Total scattering cross section
100-1024 Dalba et al. (1980)
Attachment coefficients (01-20) Taniguchi et al. (1978)
continued
See Table 262
See Table 263
See Table 264
Table 265 shows the rotational vibrational cross section for selected transitions as a function of electron energy
Selected References for D
Quantity Range: eV, (Td) Reference
Elastic scattering cross section
20-500 Wakiya (1978a)
Attachment coefficient (20-160) Masek et al. (1977) Swarm coefficients (240-1120) Gurumurthy and
Raju (1975) Ionization cross section 15-180 Märk (1975) Elastic scattering cross section
40-1000 Wedde and Strand (1974)
Ionization coefficient (100-350) Price and Moruzzi (1973)
Diffusion coefficients (10-160) Fleming et al. (1972) Diffusion coefficients (01-225) Nelson and Davis
(1972) Attachment coefficients (1-20) Chatterton and
Craggs (1971) Elastic scattering cross section
35-45 Trajmar et al. (1971)
Attachment coefficients (15-90) Grünberg (1969) Transport coefficient (15-150) Naidu and Prasad
(1970) Diffusion coefficient (01-150) Lowke and Parker
(1969) Transport coefficients (001-180) Hake and Phelps (1967) Attachment cross section
42-550 Rapp and Briglia (1965)
Ionization cross secction 125-1000 Rapp and EnglanderGolden (1965)
Attachment coefficients (01-20) Rees (1965) Swarm parameters (200-900) Schlumbohm (1965) Attachment coefficient (40-150) Freely and Fischer
(1964) Attachment coefficient (100-150) Frommhold (1964) Attachment coefficient (100-120) Dutton et al. (1963) Attachment coefficients (10-80) Chanin et al. (1962) Attachment coefficient (80-160) Prasad and Craggs
(1961) Attachment coefficient (1-20) Kuffel (1959) Ionization coefficient (200-9000) Schlumbohm (1959) Ionization coefficient (25-150) Geballe and Harrison
(1952) Attachment coefficient (01-20) Herreng (1952) Total scattering cross section
01-30 Fisk (1936)
Note: Bold font denotes experimental study
Q4
Total Scattering Cross Section
Energy (eV)
QT (10-20 m2)
Energy (eV)
QT (10−20 m2)
Energy (eV)
QT (10−20 m2)
015 469 30 112 300 485
023 427 40 100 400 400
049 495 50 98 500 35
1 612 60 95 600 31
2 627 70 89 700 28
3 646 80 855 800 255
5 718 90 83 900 235
10 104 100 81 1000 22
15 108 150 733 — —
20 107 200 585 — —
Note:See Figure 261 for graphical presentation
100 10001010.1
Cr os
ss ec
tio n
(1 0-
2 ) QT (O2)
Energy (eV)
Elastic Scattering Cross SO2 Energy (eV)
Qel (10-20 m2)
Energy (eV)
Qel (10-20 m2)
Energy (eV)
Qel (10-20 m2)
015 47 30 88 300 24
023 46 40 71 400 2
049 45 50 65 500 172
1 61 60 61 600 153
2 67 70 57 700 137
3 69 80 54 800 127
5 71 90 5 900 118
10 86 100 48 1000 112
15 88 150 398 — —
20 87 200 315 — —
Note:See Figure 262 for graphical presentation
100 10001010.1
Cr os
ss ec
tio n
(1 0-
2 )
Qel (O2)
Energy (eV)
Transfer Cross Sections for O2 Energy (eV)
Qm (10-20 m2)
Energy (eV)
Qm (10-20 m2)
Energy (eV)
Qm (10-20 m2)
001 074 5 628 100 155 002 106 7 695 150 122 004 152 10 765 200 092 007 200 15 690 300 055 01 250 20 610 400 040 025 390 25 530 500 035 04 500 30 480 600 025 06 565 40 402 700 015 08 600 50 350 800 008 1 630 60 285 1000 007 2 650 70 240 3 610 80 210 4 600 90 175
Note: See Figure 263 for graphical presentation
TABLE 26.5 Integral Ro-Vibrational Cross Sections in O2, in Units of 10−22 m2
Energy (eV)
Transition 5 7 10 15
0→ 1 95 305 312 57 0 → 2 34 114 165 15 0 → 3 — 45 75 065 0 → 4 — 35 40 031
Energy (eV)
5 6 7 8 9 9.5 10 11 15 20
0→ 1 521 1155 2024 2562 4026 4636 5363 4056 1157 175 0 → 2 — 226 604 960 1632 2011 2552 1747 389 — 0 → 3 — — 264 407 811 1012 1145 902 215 — 0 → 4 — — 115 228 473 582 653 530 120 —
Note:See Figure 264 for graphical presentation
See Tables 266 and 267
See Table 268
See Table 269
See Tables 2610 and 2611
v=0 to 1 v=0 to 2 v=0 to 3 v=0 to 4
TABLE 26.6 Threshold Energy for Excitation Processes
State Energy (eV) State
Energy (eV) State
Energy (eV)
X g 3Σ− 0 A Fu3Σ+ ( ) 4340 e(1∆2u) 9346
a1∆g(F) 0977 B u 3Σ− 6120 β3Σu+ 9355
b Fg 1Σ+ ( ) 1627 1Πg 8141 α1Σu 9455
c Fu 1Σ− ( ) 4050 d(1Πg) 8595
C3∆u(F) 4262 e′(1∆2u) 9318
− + + ∆ +∑ ∑′
States
Energy (eV) Qex (10−20 m2) Energy (eV) Qex (10−20 m2)
423 0000 15 0107
9 0092 20 0094
10 0132 45 0038
12 0120
Source:Adapted from Brunger, M, SBuckman, and MElford, in Interactions of Photons and Electrons with Molecules, Vol17c, Springer-Verlag, New York, NY, 2003
Note:See Figure 265 for additional data
TABLE 26.8 Partial and Total Ionization Cross Sections
Energy (eV) Qi(O )2
+ (10−20 m2)
(10−21 m2) Qi (O2+)
(10−22 m2) Total
(10−20 m2)
13 00127 00127
155 00792 00792
18 0178 0178
23 0395 0180 0413
28 0606 0840 0690
33 0813 182 100
38 0994 276 127
43 116 356 152
48 127 447 172
53 137 522 189
58 145 588 204
63 151 659 217
68 156 721 228
73 159 760 0125 235
78 16 795 0200 240
Partial and Total Ionization ross Sections
Energy (eV) Qi(O )2
+ (10−20 m2)
(10−21 m2) Qi (O2+)
(10−22 m2) Total
(10−20 m2)
83 162 847 0254 247
88 164 873 0372 252
93 164 903 0462 255
98 164 918 0644 256
108 162 947 0850 258
118 161 957 101 258
138 157 957 144 254
158 154 947 188 251
178 149 931 209 244
198 145 901 220 237
223 139 864 239 228
248 136 825 235 221
273 128 783 221 209
298 124 746 214 201
348 116 681 196 186
398 108 630 176 173
448 101 578 158 160
498 0948 541 140 150
548 0904 499 126 142
598 0847 468 113 133
648 0818 442 110 127
698 0777 424 101 121
748 0735 396 100 114
798 07 376 085 108
848 0684 362 081 105
898 0654 342 078 100
948 0627 331 075 097
998 0607 322 076 094
Source:Reprinted with permission from Straub, HCet al, Phys. Rev., 1996 Copyright (1996) by the American Physical Society
Note:See Figures 266 and 267 for graphical presentation
TABLE 26.9 Recommended Drift Velocity in O2 E/N W E/N W
0009 4178 1 114 (04)
0014 5903 2 178 (04)
0020 7875 4 244 (04)
003 132 (03) 5 257 (04)
004 166 (03) 6 266 (04)
005 210 (03) 7 276 (04)
008 313 (03) 8 287 (04)
010 352 (03) 10 314 (04)
020 471 (03) 12 346 (04)
040 594 (03) 14 382 (04)
06 720 (03) 17 436 (04)
08 940 (03) 20 494 (04)
25 559 (04) 500 476 (05)
30 708 (04) 600 517 (05)
40 914 (04) 700 594 (05)
50 106 (05) 800 704 (05)
60 118 (05) 900 717 (05)
70 129 (05) 1000 771 (05)
80 144 (05) 1300 896 (05)
90 158 (05) 2000 119 (06)
100 172 (05) 3000 148 (06)
200 278 (05) 4000 170 (06)
300 355 (05) 5000 191 (06)
400 425 (05)
Note:E/N in units of Td and W in units of m/sa (b) means a × 10bSee Figure 268 for graphical presentation
See Table 2612
Table 2613 shows the attachment cross section for production of O− ions due to dissociative attachment See Figure 2611 for graphical presentation
TABLE 26.11 Recommended Ratio of Radial Diffusion Coefficient to Mobility (Dr/µ) E/N (Td) Dr/µ (V) E/N (Td) Dr/µ (V)
001 0025 20 2060
002 0024 40 2700
004 0025 70 2985
007 0029 100 3391
01 0033 120 3576
02 0053 140 3846
04 0094 200 4047
07 0127 400 6500
1 0152 700 7850
2 0204 800 8700
4 0360 1000 10270
7 0728 2000 17800
10 1090 3000 25000
Note: See Figure 269 for graphical presentation
TABLE 26.10 Lateral Diffusion Coefficient Expressed as Ratio of Mobility (DL/µ) E/N (Td) DL/µ (V) NDL (1024 1/ms) E/N (Td) DL/µ (V)
Jeon and Nakamura (1998) Liu and Raju (1992)
25 0113 0914 300 155
30 0116 0854 400 174
35 0135 0910 500 187
40 0137 0849 600 199
50 0187 0959 700 208
60 0247 1098 800 221
70 0332 1318 900 224
80 0423 1530 1000 233
100 0647 2024 130 254
120 0813 2257 200 305
140 1038 2760 300 384
170 1241 3087 400 456
200 1501 3557 500 527
250 1601 3539 600 583
300 1568 3533 700 640
350 1688 3560 800 690
400 1768 3748 900 740
500 1817 3613 1000 795
600 1982 3839 1300 898
700 2214 4168 2000 1265
800 2333 4243 3000 1678
1000 245 4260 4000 2129
1200 2601 4288 5000 2618
1400 2689 4251
1700 2938 4583
2000 3361 4820
2500 3747 5113
3000 4195 5412
3500 4565 5470
Note:See Figure 269 for graphical presentation
See Table 2614
See Table 2615
Recommended DIonization Coefficients (α/N): (O2) E/N (Td) α/N (10−22 m2) E/N (Td) α/N (10−22 m2)
70 010 700 1142
80 030 800 1331
90 050 900 1511
100 070 1000 1677
130 220 1300 2103
200 92 2000 2874
300 270 3000 3582
400 489 4000 3922
500 715 5000 3960
600 932
Note: See Figure 2610 for graphical presentation
Cross Section for O2 Energy (eV)
Qa (10−23 m2)
Energy (eV)
Qa (10−23 m2)
Energy (eV)
Qa (10−23 m2)
42 000 61 1231 80 449 43 009 62 1311 81 387 44 026 63 1363 82 334 45 070 64 1311 83 281 46 070 65 1407 84 237 47 097 66 1399 85 202 48 132 67 1372 86 167 49 176 68 1337 87 141 50 220 69 1284 88 123 51 290 70 1223 89 106 52 361 71 1143 90 088 53 449 72 1064 91 070 54 537 73 985 92 070 55 633 74 897 93 062 56 748 75 818 94 053 57 853 76 739 95 044 58 959 77 642 96 044 59 1047 78 572 98 035 60 1143 79 501 99 035
Source:Adapted from Rapp, Dand DDBriglia, J. Chem. Phys, 43, 1480, 1965
TABLE 26.14 Recommended Attachment Coefficients for O2 E/N (Td) η/N (10−22 m2) E/N (Td) η/N (10−22 m2) 20 18 80 25 30 24 90 25 40 26 100 23 50 27 130 21 60 27 200 21 70 25
Source:Adapted from Raju, GG, Gaseous Electronics: Theory and Practice, Taylor & Francis, London, 2005
Note:See Figures 2610, 2612, and 2613 for graphical presentation
onstants
E/N range (Td) F ( 10−20 m2) G (Td) Deviation
257-642 197 646 ±25% 642-1026 387 1066 ±25%
Source:Adapted from Gurumurthy, GRand GRGovinda Raju, IEEE Trans. Plas. Sci, 3, 131, 1975
Note:Deviation is calculated from measured values
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