ABSTRACT
Technology ........................................................................................248 9.1.2 Challenge for RRAM on Storage-Class Memory ............................250
9.1.2.1 Performance Requirement .................................................250 9.1.3 Architecture Requirement ................................................................ 251
9.2 BTMO-Based RRAM................................................................................... 251 9.2.1 Device Fabrication and Current-Voltage Characterization .............. 251
9.2.1.1 Device Fabrication ............................................................. 251 9.2.1.2 Current-Voltage Characterization ..................................... 253
9.2.2 BTMO RRAM Integration for Embedded Application on 0.18 μm Al Process and 0.13 μm Cu Process ............................. 255 9.2.2.1 RRAM Integration on 0.18 μm Al Process ........................ 255 9.2.2.2 RRAM Integration on 0.13 μm Cu Process .......................256
