ABSTRACT
This chapter considers two types of microactuator models: a micro electro-mechanical system actuator and a piezoelectric zirconate titanate (PZT) actuator. It proposes design controls for the primary and the secondary actuators such that a low hump of the sensitivity function can be achieved with the help of secondary actuators. The chapter is concerned with the parallel structure since it is a basic structure for dual-stage control systems and can be converted to the decoupled master-slave structure. The H8 loop shaping method is used to design controllers for the primary actuator and the microactuator to achieve a low-hump sensitivity function for the dual-stage actuator system. It is known that MATLAB functions are available to design the controller. The voice coil motor and PZT controllers are obtained by discretizing the designed controllers with frequency responses. Controllers are implemented with dSpace 1103 on a TMS320C240 DSP board.
