ABSTRACT
This chapter summarizes the development trends of micromechatronics and the necessity of computer simulation, in particular, finite element method (FEM). The vibration noise and temperature fluctuations of the shuttle make it difficult for a sharp image to be obtained, however, and the use of a responsive positioner was considered to compensate for the detrimental effects. The application of computer simulation to smart devices and systems began in the late 1970s. A simple multimorph deformable mirror was proposed, which could be simply controlled by a microcomputer. The analytical approaches were mostly used in the development in the 1980s. Free vibration analysis was performed using an FEM program on the structures. Vibration measurement with a laser vibrometer indicated the counterclockwise elliptical vibration of both legs, which agrees well with FEM predictions. Tests of the motor’s action in both directions resulted in similar speed versus drive voltage curves.
