ABSTRACT
References . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 350
II. Water Hammer-Free System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 351
A. Outline . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 351
B. Water Hammer Prevention Technology . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 352
C. Vibration-Sensing Water Hammer-Free System . . . . . . . . . . . . . . . . . . . . . . . . 354
D. Content Volume Change-Free Valve . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 355
E. Summary . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 357
III. Al2O3 Passivation Technology on Austenitic Stainless
Steel for Ozone using Process . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 357
A. Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 357
B. Experimental . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 358
1. Al2O3 Passivated Film Formation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 358
2. XRD Pattern of Al2O3 Passivation Film . . . . . . . . . . . . . . . . . . . . . . . . . . . 363
3. Resistance to Ozone-Dissolved Water . . . . . . . . . . . . . . . . . . . . . . . . . . . . 363
References . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 366
IV. Gas Permeability of Plastic Materials . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 366
A. Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 366
B. Gas Permeability of Plastic Materials . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 366
C. Conclusion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 369
Reference . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 369
V. Fluoridation Passivation Technology . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 370
A. Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 370
B. Fluoridation of Electroless-Nickel-Phosphor-Plating Film . . . . . . . . . . . . . . . 370
C. Performance of Nickel-Fluoride Film . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 372
References . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 373
VI. Metallic Surface Fluorocarbon Coating Technology . . . . . . . . . . . . . . . . . . . . . . . . . . 373
A. Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 373
B. Fluorocarbon CVD on NiF2 Surface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 374
C. Electrostatic Powder Painting Film Deposition Technology . . . . . . . . . . . . . . . 375
VII. Future Ultrapure Water Manufacturing Technology . . . . . . . . . . . . . . . . . . . . . . . . . . 377
In recent years, we have seen the key drive to boost demands for semiconductors shift from such
general-purpose appliances as personal computers to large scale integration (LSI), which is
embedded in IT-related electric household appliances. Because of this situation, IT-related electric
household appliances will need to be improved in versatility and quality, along with cost reduction.
Accordingly, the product life cycle of these goods may be 6 months or more, which is far shorter
than those general-purpose appliances whose life cycle is about 2-3 yr, because consumers who
purchase IT-related electric household appliances are more likely to be fickle. Furthermore, the
figure for the production for IT-related electric household appliances is estimated to be a
hundred thousand to several million units, which is about one-hundredth to one-thousandth of the
figure for general-purpose appliances. In order to enhance profitability in such low-volume/highvalue goods, the manufacturers should change their modality from such high-volume/low-mix production as 20-30 thousand tips per month with lump-sum investment into such low-volume/ high-mix one as 2-3 thousand tips per month with phased investment. With this in mind, the
process engineering should be flexible to enable makers to spawn new goods as quickly as possible
and meet a variety of consumers’ preferences in a timely manner.
