ABSTRACT
T.F. Meister, H. Scha¨fer, W. Perndl, and J. Bo¨ck ...................................................... 3.8-307
Introduction . Process Concept . Transistor Fabrication Process .
Transistor Results . Additional Devices . Circuit Performance
3.9 Industry Examples at State-of-the-Art: IHP D. Knoll ........................................ 3.9-321
Introduction . History of IHP’s SiGe and SiGe:C HBT Technologies .