ABSTRACT

T.F. Meister, H. Scha¨fer, W. Perndl, and J. Bo¨ck ...................................................... 3.8-307

Introduction . Process Concept . Transistor Fabrication Process .

Transistor Results . Additional Devices . Circuit Performance

3.9 Industry Examples at State-of-the-Art: IHP D. Knoll ........................................ 3.9-321

Introduction . History of IHP’s SiGe and SiGe:C HBT Technologies .