ABSTRACT
In Chapter 1 we defined x-ray metrology (XRM) as the application of x-ray interference for measurement of material dimensions. This is achieved by splitting the x-ray wavefront through scattering by the material, and detecting the recombined component waves. The two fundamental parameters measured through such interference are layer thickness (in any structure, including amorphous) and strain (in crystals). Parameters that may be reliably derived from these include composition in crystalline materials, mosaic spread, and lateral nanostructure. We shall show in this chapter that such parameters can be measured or deduced with full traceability to natural or international standards.
