ABSTRACT
From MEMS to Bio-MEMS: Manufacturing Techniques and Applications consists of ten chapters in three parts. In Part I, we compare available manufacturing options for microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS), introduce inspection options for the produced parts (metrology), and summarize available modeling software for MEMS and NEMS. Nonlithographybased (traditional) manufacturing techniques are contrasted with lithography-based ( nontraditional) methods in Chapter 1. In Chapter 2, we investigate nature as an engineering guide, and we contrast top-down and bottom-up approaches in Chapter 3. In Chapter 4 we learn about packaging, assembly, and self-assembly from integrated circuits to DNA and biological cells. In these chapters we aim to help the reader decide upon an optimized manufacturing option to tackle specific manufacturing problems. We then introduce some selected new MEMS and NEMS processes and materials in Chapter 5. Finally, we cover metrology techniques for MEMS and NEMS and summarize MEMS and NEMS modeling in Chapter 6.
