ABSTRACT
The methodology used to implement the information transfer from the analysis of process variations to the stage of circuit design is discussed in this chapter. In the chapter, the issues originating from different sources of process variability are discussed and modeling approaches which help to analyze the problems are presented. A 2D device simulation model is used to demonstrate the potential of the methodology. The process-aware SPICE model generated from simulations is presented. TCAD tools provide detailed physical insight into achieving the optimum process performance affecting yield. TCAD represents our physical understanding of processes and devices in terms of computer models of semiconductor physics. Design for Manufacturing (DFM) is a technique for addressing the producibility issues early in the design cycle, and integrating manufacturing concerns and considerations into a design to obtain a more producible product. DFM techniques counter measures against manufacturing difficulties. Different DFM tools address the problems derived from variability in the manufacturing process.
