ABSTRACT
Microtechnology and microfabrication processes are used to produce devices with dimensions ranging from micrometers to millimeters. In this chapter, it is shown that microfabrication processes can be effectively applied to develop various actuators and sensors, including humidity sensors. This chapter includes consideration of such problems as the CMOS process and its use in the manufacture of humidity sensors, features of micromachining processes based on bulk and surface micromachining, and approaches designed for manufacturing membranes and cantilevers. PSi-based micromachining, laser micromachining, LIGA micromachining, and wafer bonding are also considered in this chapter. This consideration shows that each of discussed technologies has its advantages and disadvantages. Therefore, each developer, based on the available capabilities and requirements for the device being developed, must choose the process that is most suitable for the implementation of his plans.
