ABSTRACT
Membranes and cantilevers are important components of many humidity sensors, largely determining their sensitivity and power consumption. As a rule, membranes and cantilevers are made using the micromachining techniques described in the previous chapter. In this chapter, it is shown that based on the requirements for the sensor, membranes and cantilevers can be formed by different materials with different physical and physico-chemical properties. Therefore, the process of their manufacture is not unified. Each type of membrane and cantilever has its own specific manufacturing and its own specific set of processes. Functionalization of cantilever and membrane surfaces is also considered in the chapter.
