ABSTRACT
The description of the technologies suitable for fabrication of humidity sensors is presented in the chapter. It is shown that vapor-phase methods such as vacuum evaporation, sputtering, laser ablation, chemical vapor deposition (CVD), and liquid-phase methods such as the sol-gel method, chemical deposition, liquid phase deposition (LPD), electrophoretic deposition (EPD), and electro-chemical deposition (ECD) can be used for sensing layers forming. Specific methods used for humidity-sensitive material preparation, such as template-based synthesis, electrospinning, and the Langmuir–Blodgett process, are also discussed. Considerable attention is paid to the consideration of advantages and disadvantages of these methods. The features of the manufacture of planar, ceramic, thin-film, and thick-film sensors are described. The comparison and analysis of the film and the thin-film technologies is given. Features of the morphology of the films deposited using methods of thin-film technology are also considered.
